RESEARCH  ALD based Functional Thin Films and Its Applications

 

Equipment Mist CVD Detail □ Substrate size : 15 x 15..   Equipment Sonicator Detail   Equipment ALD1 (NCD, D100) Detail □ Substrate size : 6 inch ..   Equipment ALD2 (iSAC, handmade) Detail □ Substrate size : 6 inch ..   Equipment Magnetron Sputtering Syst.. Detail □ 도달 압력 : 10^-7 torr□ S..   Equipment Co-Sputtering System Detail □ 도달 압력 : 8.0 x 10^-7 ..   Equipment agilent 4284A / 4155A Sem.. Detail agilent 4284A / 4155A Semicon..   Equipment 4145B Semiconductor param.. Detail   Equipment Vacuum Chamber Probe Stat.. Detail □ Vacuum : 10^-3 torr□ CCD ..   Equipment Probe station (1) Detail     1   2   3   4  Equipment  ~