RESEARCH
ALD based Functional Thin Films and Its Applications
Equipment
Gas scruber
Detail
Equipment
Sonicator
Detail
Equipment
ALD1 (NCD, D100)
Detail
¡à Substrate size : 6 inch ..
Equipment
ALD2 (iSAC, handmade)
Detail
¡à Substrate size : 6 inch ..
Equipment
Magnetron Sputtering Syst..
Detail
¡à µµ´Þ ¾Ð·Â : 10^-7 torr¡à S..
Equipment
Co-Sputtering System
Detail
¡à µµ´Þ ¾Ð·Â : 8.0 x 10^-7 ..
Equipment
agilent 4284A / 4155A Sem..
Detail
agilent 4284A / 4155A Semicon..
Equipment
4145B Semiconductor param..
Detail
Equipment
Vacuum Chamber Probe Stat..
Detail
¡à Vacuum : 10^-3 torr¡à CCD ..
Equipment
Probe station (1)
Detail
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Equipment
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Research
Journal
Lecture
Location