RESEARCH
ALD based Functional Thin Films and Its Applications
Equipment
ALD 7th (iSAC, high Temp...
Detail
iSAC, high Temp. PEALD
Equipment
NH3 Gas Cabinet
Detail
Equipment
UV-ozon furnace
Detail
Equipment
Hall measurement
Detail
Equipment
ALD5 (iSAC, PEALD)
Detail
Equipment
Glove Box
Detail
Equipment
UV light(in Glove Box)
Detail
Equipment
Evaporator(in Glove Box)
Detail
Equipment
ALD4 (in Glove Box, iSAC)
Detail
Equipment
ALD3 (iSAC, PEALD)
Detail
1
2
3
4
Equipment
~
Research
Journal
Lecture
Location