RESEARCH  ALD based Functional Thin Films and Its Applications

 

Equipment ALD 7th (iSAC, high Temp... Detail iSAC, high Temp. PEALD   Equipment NH3 Gas Cabinet Detail   Equipment UV-ozon furnace Detail   Equipment Hall measurement Detail   Equipment ALD5 (iSAC, PEALD) Detail   Equipment Glove Box Detail   Equipment UV light(in Glove Box) Detail   Equipment Evaporator(in Glove Box) Detail   Equipment ALD4 (in Glove Box, iSAC) Detail   Equipment ALD3 (iSAC, PEALD) Detail     1   2   3   4  Equipment  ~