ȨÆäÀÌÁöÀÇ »õ·Î¿î ÆÐ·¯´ÙÀÓ

Áö¼ÓÀûÀÎ ¿¬±¸°³¹ßÀ» ÅëÇÑ Á¦Ç°°³¹ß°ú ǰÁúÇâ»ó¿¡ ³ë·ÂÇϰí ÀÖ½À´Ï´Ù.

patent

journal
patent
conference
 

PUBLICATION  Patent

patent

 

 

Á¶È¸¼ö 323
Ä«Å×°í¸® 2019
Á¦¸ñ [±¹³»Æ¯ÇãÃâ¿ø][¼­¿ï»êÇÐÇù·Â´Ü][P20180672OP][Less mask ¹Ú¸· Æ®·£Áö½ºÅ͸¦ À§ÇÑ Etching °í ¼±Åúñ¸¦ °¡Áø ALD ±â¹Ý »êÈ­¹° ¹ÝµµÃ¼ ÁõÂø¹ý]ƯÇã
[±¹³»Æ¯ÇãÃâ¿ø][¼­¿ï»êÇÐÇù·Â´Ü][P20180672OP][Less mask ¹Ú¸· Æ®·£Áö½ºÅ͸¦ À§ÇÑ Etching °í ¼±Åúñ¸¦ °¡Áø ALD ±â¹Ý »êÈ­¹° ¹ÝµµÃ¼ ÁõÂø¹ý]ƯÇã°¡ Ãâ¿øµÇ¾ú½À´Ï´Ù.


- ±Í±³°ü¸®¹øÈ£: P20180672OP
- Ãâ¿ø¹øÈ£: 10-2019-0020017
- ±Ç¸®ÀÚ: ÇѾç´ëÇб³ »êÇÐÇù·Â´Ü

- Ãâ¿øÀÏ : 2019.02.20
÷ºÎÆÄÀÏ