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조회수 196
카테고리 2021
No 253
제목 19. [Ceramics International] A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition
19. [Ceramics International] A study on the growth mechanism and gas diffusion barrier property of homogeneously mixed silicon-tin oxide by atomic layer deposition


Ju-Hwan Han, Dong-Yeon Kim, Seunghwan Lee, Hae Lin Yang, Byung Ho Park, and Jin-Seong Park
첨부파일
1-s2.0-S0272884221027954-main.pdf