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조회수 23
카테고리 2021
No 232
제목 3. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium
3. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium


TaeHyun Hong, Wan-Ho Choi, Su-Hwan Choi, HyunKyung Lee, Jang Hyeon Seok, Jung Woo Park,  Jun Hyung Lim, Jin-Seong Park
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Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films.pdf