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Á¶È¸¼ö
23
Ä«Å×°í¸®
2021
No
232
Á¦¸ñ
3. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium
3. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium
TaeHyun Hong
, Wan-Ho Choi
, Su-Hwan Choi
, HyunKyung Lee
, Jang Hyeon Seok
, Jung Woo Park,
Jun Hyung Lim
, Jin-Seong Park
÷ºÎÆÄÀÏ
Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films.pdf
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