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조회수 12
카테고리 2020
No 224
제목 13. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium

13. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium







TaeHyun Hong, Wan-Ho Choi, Su-Hwan Choi, HyunKyung Lee, Jang Hyeon Seok, Jung Woo Park , Jun Hyung Lim , Jin-Seong Park

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1-s2.0-S0272884220326742-main.pdf