13. [Ceramics International] Plasma Enhanced atomic layer deposited amorphous gallium oxide thin films using novel trimethyl[N-(2-methoxyethyl)-2-methylpropan-2-amine] gallium
TaeHyun Hong, Wan-Ho Choi, Su-Hwan Choi, HyunKyung Lee, Jang Hyeon Seok, Jung Woo Park , Jun Hyung Lim , Jin-Seong Park